Get current pricing for Kla-tencor Surfscan 6400, KLA-Tencor Surfscan 6400-48292-ID Throughput: Up To 120 Wafer Per Hour Using 150mm Wafers. 0.15 Micron Defect Sensitivity @ 95% Capture On Bare Silicon, Based On Psl Standards 0.02pp . Product Category: Semiconductor, Sub Category: Metrology And Inspection:

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Manufacturer: Kla-tencor Surfscan 6400 Part number: KLA-Tencor Surfscan 6400-48292-ID Description: Throughput: Up To 120 Wafer Per Hour Using 150mm Wafers. 0.15 Micron Defect Sensitivity @ 95% Capture On Bare Silicon, Based On Psl Standards 0.02pp . Product Category: Semiconductor, Sub Category: Metrology And Inspection

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